High Vacuum Sputtering Thin Film System

High Vacuum Sputtering Thin Film System
English
Equipment Brand 
世欣科技股份有限公司 (SSI)
Purchase Date 
2018.07
Location 
人科二館 DS114
Associated Lab 
Advanced Multifunctional Thin Film Laboratory
Function Description 

  • Capable of fabricating magnetostrictive thin film materials such as Co, CoFeB, and multilayer structures like Co/AlOx/CoFeB.

  • Enables the fabrication of critical alloy thin films including CoFeB, CoFeV, CoFeW, and CoFeWB, which are essential materials for spintronic devices such as STT-RAM.

  • Supports the development of novel flexible and transparent electrode materials, including metal mesh transparent electrodes, advanced metal oxide films, and composite transparent conductive films.

  • Capable of producing low-dimensional nanostructured thermoelectric thin films for energy conversion applications.

  • Performs high-vacuum annealing processes for material treatment.