High Vacuum Sputtering Thin Film System
English (英文)
儀器廠牌 Equipment Brand
世欣科技股份有限公司 (SSI)
購置日期 Purchase Date
2018.07
放置位置 Location
人科二館 DS114
所屬實驗室 Associated Lab
功能說明 Function Description
-
Capable of fabricating magnetostrictive thin film materials such as Co, CoFeB, and multilayer structures like Co/AlOx/CoFeB.
-
Enables the fabrication of critical alloy thin films including CoFeB, CoFeV, CoFeW, and CoFeWB, which are essential materials for spintronic devices such as STT-RAM.
-
Supports the development of novel flexible and transparent electrode materials, including metal mesh transparent electrodes, advanced metal oxide films, and composite transparent conductive films.
-
Capable of producing low-dimensional nanostructured thermoelectric thin films for energy conversion applications.
-
Performs high-vacuum annealing processes for material treatment.