DC Magnetron Sputtering System

Capable of fabricating magnetostrictive thin film materials such as Co, CoFeB, and multilayer structures like Co/AlOx/CoFeB.

Enables the fabrication of critical alloy thin films including CoFeB, CoFeV, CoFeW, and CoFeWB, which are essential materials for spintronic devices such as STT-RAM.

Supports the development of novel flexible and transparent electrode materials, including metal mesh transparent electrodes, advanced metal oxide films, and composite transparent conductive films.

Capable of producing low-dimensional nanostructured thermoelectric thin films for energy conversion applications.

Performs high-vacuum annealing processes for material treatment.